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发明名称
Vapour phase deposition process
摘要
申请公布号
GB2185494(A)
申请公布日期
1987.07.22
申请号
GB19860001188
申请日期
1986.01.18
申请人
* STC PLC
发明人
CLIFFORD GRAHAM * CURETON
分类号
C23C16/48;(IPC1-7):C23C16/48
主分类号
C23C16/48
代理机构
代理人
主权项
地址
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