| 摘要 |
PURPOSE:To increase the durability of a leaf spring by controlling the elastic deformation of the entirety by a main member and grasping a sample by another auxiliary member. CONSTITUTION:A leaf spring 4 is separated into a main member 5 and an auxiliary member 6, which are plastically formed from platelike materials to bond both members. A rounded projection 6a is formed on the member 6 at a wafer 3 inserting side to smoothly move at the time of contacting with the outer periphery of the wafer. The spring 4 is arranged on the periphery of a ring 7. The end 4a of the spring 4 is pressed down to insert the wafer, and is then released. The spring 4 grasps the wafer only by the auxiliary member to apply a suitable spring force in combination with the rigidity of the member 5. Since the spring is separated into the main and auxiliary members, a local stress produced at grasping time is reduced to eliminate a permanent deformation and to extend its life.
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