| 摘要 |
PURPOSE:To accelerate an inspection by attracting an LED in vacuum by a collet serving concurrently as an electrode, carrying it to a measuring stand, and measuring the characteristic of the LED when the lower surface of the LED contacts with the stand. CONSTITUTION:A unit 5 operates to attract and hold in vacuum an LED chip 1 on a tray 3 by a collet 9 and to carry it to a measuring stand 2. A voltage is applied to the collet 9 and the stand 2 in synchronization with the operation of the collet. Thus, a light 14 is emitted at the moment that the lower electrode 17 of the chip 1 contacts with the stand 2. The light 14 is detected by a photodetector 13, and processed by a processor 15 to be measured for the light emitting characteristic. When the measurement is finished, the unit 5 operates to carry the chip 1 continuously held by the unit 5 to a tray 4 to release the attraction. With this construction, the chip is contacted only once with the collect during a series of measuring works to inspect it at a high speed by a method having less degree of fear of damaging the chip.
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