| 摘要 |
PURPOSE:To simplify the construction of a power source for a gas laser having discharge exciting means, laser gas circulating means, and inverters for supplying driving AC powers to cooling systems by providing a common rectifier at least in two of the inverters. CONSTITUTION:One rectifier 1 is used to apply a DC power therefrom to a discharge power source 2, a blower driving power source 3, and a cooling system power source 4. The power source 2 has an inverter 21 for converting the DC power supplied from the rectifier 1 into an AC power, a controller 23 for maintaining the output of the inverter 21 constant on the basis of the output of a sensor 22, a booster 24, and a matching circuit 25 for matching the discharge electrodes 51 and 52 of a gas laser 5. The power source 3 has an inverter 31, a controller 43 for maintaining the output of the inverter 31 constant on the basis of the output of a sensor 32, and a blower 53. Further, the power source 4 has an inverter 41, a controller 43 for maintaining the output of the inverter 41 constant on the basis of the output of a sensor 42, and a cooler 6. |
