| 摘要 |
PURPOSE:To raise the speed of exhaust and the grade of vacuum, by covering an inside facing a suction port, with jet boundary of operating liquid steam. CONSTITUTION:A jet source 8 is set and operating liquid steam is sent in, for covering all over the inside of the suction port 2 of a casing 1, with jet boundary surface. Operating liquid steam shaped in a conic circumferential surface is jetted from a nozzle 10, and the inside facing the suction port 2 is covered with the jet boundary surface 11. Accordingly, a counter current of molecular flow of gas to be discharged is prevented, as molecule of gas to be discharged, which flows from the suction port 2, does not strike anything other than the jet boundary surface 11 of the operating liquid steam, and consequently, the speed of exhaust can be raised, and achievable grade of vacuum can be made to be high.
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