| 摘要 |
PURPOSE:To take an accurate measurement at low cost by providing a table which moves a light source which is small in area. CONSTITUTION:The moving table 5 where the light source 1 is mounted is set above a measurement starting element (left end) and an element to be measured is lightedin the center. A measurement controller 6 measure right elements one after another while switching probes and also moves the table 5 to right so that the light source 1 is always above an object photoelectric element. The area of the light source 1, however, is large enough for photoelectric elements, so the movement of the table 5 need not coincide with a measurement speed and the table 5 need not stop at each measurement point either. Thus, the measuring operation is repeated successively to measure all elements. The table 5 which moves in parallel to a photoelectric sensor is provided, to the light source 1 in use may be small in area and variance in illuminance is reduced, thereby improving the measurement accuracy.
|
