| 摘要 |
PURPOSE:To perform processing of increased elaborateness and good reproducibility in processing part of an organic polymer, by selectively irradiating the area to be processed with laser beams and removing organic polymer on an unirradiated area by heating or etching. CONSTITUTION:In processing pattof an organic polymer, an organic polymer on an area to be processed is irradiated selectively with laser beams. Then an organic polymer on an unirradiated area is removed by heating or etching. It is desirable that an excimer laser is used as said laser beams. When polytetrafluoroethylene or thermosetting 1,2-polybutadiene resin is used as said organic polymer, said processing is highly effective because such resins can hardly be processed otherwise.
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