发明名称 CHECKING METHOD IN PERFORMANCE INSPECTION DEVICE FOR SEMICONDUCTOR PART
摘要 PURPOSE:To check contacts only with each lead in semiconductor parts electrically and positively without mutual contacts and contacts with a supply means such as a chute in respective socket pin in a handler measuring instrument by supplying the positions of the handler measuring instrument with two dummy parts through the chute. CONSTITUTION:When the position of a handler measuring instrument 3 with a plurality of socket pins 4 is supplied with a first dummy part 11, which has leads 11b in the same shape and size as and the same number as a semiconductor part 1 and in which said each lead is conducted mutually, respective socket pin 4 in the handler measuring instrument is brought into contact with each lead in the first dummy part 11 by the relative motion of the handler measuring instrument 3 and a supply means such as a chute 2. When the position of the handler measuring instrument 3 is supplied with a second dummy part 12, which has leads 12b in the same shape and size as and the same number as the semiconductor part and in which each lead is isolated mutually under a non-conductive state, in place of said first dummy part, respective socket pin 4 in the handler measuring instrument is brought into contact with each lead 13b in the second dummy part 12 by the relative motion of the handler measuring instrument 3 and the supply means such as the chute 2.
申请公布号 JPS62163337(A) 申请公布日期 1987.07.20
申请号 JP19860005517 申请日期 1986.01.14
申请人 ROHM CO LTD 发明人 NISHIDA AKIHIRO
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
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