| 摘要 |
PURPOSE:To obtain a highly accurate mass flow meter with a better temperature characteristic, by providing a temperature sensor at a position where the temperature thereof becomes the same as that of a detection sensor. CONSTITUTION:In a mass flow meter which is designed to measure mass flow rate detecting a varying lift and the vortex frequency utilizing a von Karman's vortex signal acting on a force receiving body as alternating force, a temperature sensing body 4 is set almost the same position as a strain gauge 3 to detect a measuring fluid temperature and a value E4 subject to temperature correction is outputted by a temperature conversion circuit 59. Then, a temperature correction is made by an output signal E3 from a division circuit 58 and the signal E4 from the temperature conversion circuit 59 and a temperature correction circuit 61 multiplies E3 by E4 to obtain a mass flow rate rhoQ. |
