| 摘要 |
PURPOSE:To fix and remove a wafer easily by a method wherein a wafer fixing ring with a female screw engaging with a male screw is mounted on a rotary axle holder so that the wafer fixing ring may be vertically moved by turning the female and male screws to closely fix and release the wafer. CONSTITUTION:A wafer 2 is pressed down on a turntable 1 by a press down piece 4 of a wafer fixing ring 3 to be closely held. At this time, the surface of table 1 takes a slightly convex shape to improve the adhesive property between the wafer 2 and the table 1. Next, the table 1 is turned in A direction to etch the wafer 2 while being turned. After finishing the etching process, the table 1 is reversely turned in B direction so that a male screw 14 of a rotary axle holder 13 may be engaged with a female screw 15 of the ring 3 to lift the ring 3. Thus the wafer 2 fixed by a press down piece 4 is released from the fixation, being held on a holding piece 5 on the inner face of a side member 17 to be lifted. At this time, a new wafer 2 is mounted on the holding piece 5 and then the table 1 is turned again in A direction.
|
