| 摘要 |
PURPOSE:To continuously form a film in one vacuum vessel and to stabilize the characteristic of the vertically magnetized film by ionizing and depositing a magnetic material on a flexible substrate in high-frequency-excited plasma, and then ionizing and depositing an org. material on the formed layer in high-frequency-excited plasma. CONSTITUTION:The flexible substrate 8 of polyester is mounted on a holder 9, pelletized metallic cobalt, metallic chromium, and polymethyl methacrylate resin are respectively charged in boats 6, 6', and 6'' and held at the specified positions in a bell jar. Then the inside of the bell jar is evacuated to 10<-5>Torr air pressure, gaseous argon is introduced, the pressure is kept at 8X10<-4>Torr, and a high-frequency electric field is generated on an electrode 7 to produce glow discharge. Then the boats 6 and 6' are heated by vaporization electric power source 10 and 10' to melt and vaporize the metallic cobalt and metallic chromium, ion plating is carried out, and a vertically magnetized film is formed on the flexible substrate. Power supply is then stopped, gaseous argon is introduced by controlling a variable valve 2, the pressure is kept at 1X10<-3>Torr, glow discharge is again generated, the boar 6'' is heated by a vaporization electric power source 10'', and polymethyl methacrylate is decomposed and vaporized to form a protective film on the vertically magnetized film.
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