| 摘要 |
PURPOSE:To perform the optimum stoppage local servocontrol in overall printing processes required of a contractive projection type semiconductor printing device by a method wherein the local servocontrol of XY stage is programably performed in a step and repeating correspondingly to the kinds of wafer printing processes. CONSTITUTION:The characteristics such as phase compensation, frequency characteristics and gain set up on a servocharacteristics variably set up circuit FD of a location servoamplifier GA on an XY stage by a microprocessor CP. Then the servocharacteristics assuring of the absolute local precision of XY stage are set up on said circuit FD by the microprocessor CP for the step driving local servocontrol in the first mask process. Besides, the servocharacteristics assuring of the stoppage stability are set up in the alignment process. Through these procedures, local servocontrol of the optimum servocharacteristics is performed in every process.
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