| 摘要 |
PURPOSE:To improve the corrosion resistance of a feeder layer and prevent stripping of a protection layer by interposing a nitrized film adhered layer between a feeder layer which supplies an electric power to a thermal resistor layer on a glazed layer and a protection layer of SiO2 formed on the feeder layer. CONSTITUTION:A part glazed layer 2 is formed on an insulative substrate, and a thermal resistor layer 3 and a feeder layer 4 of aluminium are evaporated sequentially to form a thermal dot part. Next, oxygen gas is applied to said part by plasma ashing technique so as to reduce organic substance on the surface of the part to ashes. Then sputtering is employed to form a 0.3mum thick nitrized film adhered layer 10 of AlN or Si3N4. After this, an SiO2 layer of 2mum thickness and a Ta2O5 of 5mum thickness are sequentially sputtered on the nitrized film adhered layer. In this manner, the gradual progressive corrosion of the feeder layer 4 can be prevented because of a strong bonding power between the feeder layer 4 of aluminium and the nitrized film adhered layer 10, even if corrosive ions such as chlorine ion found their way into the feeder layer through pin holes 9. Thus the thermal head is elongated in life. |
