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发明名称
METHOD OF DIVIDING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS62161511(A)
申请公布日期
1987.07.17
申请号
JP19860004598
申请日期
1986.01.13
申请人
SANYO ELECTRIC CO LTD
发明人
IMAI YASUSUKE
分类号
H01L21/301;B28D5/00;H01L21/67;H01L21/68;H01L21/78
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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