| 摘要 |
PURPOSE:To improve the prescribed problems such as a producibility, a responsible rate and an unevenness of the coloring density of the titled element, without increasing a production cost and a material cost by using two layer film composed of the electroconductive material such as ITO, etc., and titanium, or three layer film composed of the electroconductive material such as ITO, etc., and titanium and chromium, as the feeding electrode of the counter electrode. CONSTITUTION:The feeding electrode of the counter electrode is formed by coating the electroconductive film composed of the titanium film on the inner surface of the substrate which is the counter electrode. The film thickness of the titanium film may be determined so as to meet the resisting value demanded to the feeding electrode complying with an electrode pattern and a capacity required for the electrode, and is usually 3,000-50,000Angstrom . The temp. of the substrate is preferably higher than that of a room temp. to reduce the resisting value of the titanium film. If the temp. of the substrate is too high, as the working period for producing the titled element becomes long, the prescribed temp. is preferably a range of 50-350 deg.C. The titled element capable of preventing an increasement of a contact resisting value due to the oxidation of the surface of the titanium film and having a less tendency for generating variance of the responsibility may be produced stably by forming the electroconductive film on the titanium film.
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