| 摘要 |
PURPOSE:To easily produce a large-sized target whose density is close to the theoretical density by melting and solidifying ceramic powder by water plasma spraying. CONSTITUTION:Powder of ZrO2, SiO2, Ta2O5, TiO2, Al2O3, Fe2O3 or other ceramics contg. such compounds as the principal components is prepd. The desired ceramic powder is fed to a plasma jet from a feed pipe 5, sprayed on a material such as a backing plate 6 with the plasma jet and built up. The resulting formed body is a sputtering target having the theoretical density. When the target is used, sputtering efficiency is improved. The target is hardly broken or cracked during sputtering. |
