| 摘要 |
PURPOSE:To remove an impurity gas in a well for melt by enabling a lid to slide on an upper boat in order to make the state of the well for melt from an open state to a closed one. CONSTITUTION:A substrate 3 is put in a well 2, a melt material 7 is stored in a well 5 for melt, the whole boat is put in a quartz reaction tube and a hydrogen atmosphere is made at a room temperature. Then, a slide rod 10 is drawn to the right direction and a lid 6 is slided to the left direction against an upper boat 4 by a stopper 8. Then, the melt material 7 is melted to a melt 7 by moving the whole boat to a high temperature region by using a slide rod 9 and the temperature of the whole is made uniform. Later, the temperature of the whole boat is made lower at a constant speed by moving the slide rod 10 to the left direction and an epitaxial film is grown on the substrate 3. Then, the slide rod 10 is moved further to the left direction, the epitaxial film and the melt 7 are separated and the whole boat is moved in a room temperature region by the slide rod 9. This can remove an impurity gas in the well for melt and can obtain a film of good characteristics by reducing the evaporation of an easily volatile element at the time of epitaxial growth.
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