POSITION DETECTOR FOR MAGNETIC LEVITATION TRAVELING APPARATUS

摘要

PURPOSE:To alleviate a shock to be applied to a traveling slider by a gap even if a gap is formed at a seam of guide rails by averaging the inductance of a spiral coil of each sensor head, and outputting a displacement signal according to the averaged value. CONSTITUTION:A sensor head 70 for detecting a gap between a slider and the guide surface 20a of a guide rail 20 has spiral coils 701-703 arranged at a predetermined interval in the moving direction of the slider. The head 70 averages the inductances of the coils 701-703, and a tuner 80 and a detector 83 output the averaged value of gaps between the coils 701-703 and the rail 20. The intervals of the coils 701-703 are set to the gap which does not simultaneously generate a variation in the inductance due to the gap of the seal 20 of the rail 20 in two or more coils.