| 摘要 |
PURPOSE:To provide a display element having good coloring and decoloring contrast, response speed, reliability and reproducibility by subjecting an electrolyte layer to a water absorbing treatment during or after formation of said layer. CONSTITUTION:A transparent electrode 2 consisting of, for example, indium oxide contg. 5% tin oxide is formed on a glass base plate 1 and WO3 is provided as an electrocoloring layer 3. Gaseous Ar contg. 20% steam is introduced into said layer after evacuation down to 3X10<-6>torr vacuum and the degree of vacuum is increased to 2X10<-2>torr then ZrO2 is formed by sputtering thereby forming an electrolyte layer 4. The partial pressure of the steam in this stage is 4X10<-3> torr. Au is thereafter formed as a counter electrode and an electrocoloring element 5 is thus obtd. |
