| 摘要 |
PURPOSE:To aim at improvement in separating sensitivity, by separating the secondary ion outputted after drawing in an electrode part with an energy filter, having a broad acceptance in terms of space and energy, by energy, and leading it into a mass spectrometer. CONSTITUTION:A secondary ion beam 15 to be spattered out of an analyzed object 13 is drawn in by a drawer electrode part 14 of beam polarity, reverse polarity and low voltage and then made so as to be fed to an energy filter 16. Therefore, such a possibility that disturbance of an electric field in a peripheral part of the analyzed object 13 is entailed is brought to nothing, and the secondary ion beam 15 comes to be properly collectable. In addition, since the energy filter 16 at the secondary ion output side of the drawer electrode 14 is formed into a broad acceptance structure in terms of space and energy, collecting efficiency of the secondary ion is heightened, and even in case energy width is varied to, for example, 5ev or so, the secondary ion beam 15 is deflectable with a small deflection angle. |
