发明名称 METHOD AND DEVICE FOR CONTROLLING TEMPERATURE
摘要 PURPOSE:To control the temperature quickly with a high precision by obtaining preliminarily correspondence relations between the supply power to a radiation heating means and the temperature of a body to be heated. CONSTITUTION:A target temperature change curve is set preliminarily in a target temperature setter 10. A target temperature signal T0 from the target temperature setter 10 is inputted to a subtractor 31 together with an actually measured temperature signal Tr from a temperature detector 5 provided on the surface of a water 1 in a heating furnace 3 and becomes a deviation signal DELTAT for feedback control. This deviation signal DELTAT is inputted to multipliers 32-34. Multiplication of Kd in the multiplier 34 corresponds to multiplication of a gain in the preceding stage where a differential control output is obtained, and the multiplication output is given to the side of a feed-forward control system FF1. The target temperature signal T0 from the target temperature setter 10 is given to two multipliers 37 and 38 in the feed-forward control system FF.
申请公布号 JPS62160512(A) 申请公布日期 1987.07.16
申请号 JP19860002549 申请日期 1986.01.08
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 TERAOKA HIDEYUKI;CHIBA TAKATOSHI
分类号 G05D23/19;H01L21/22;H01L21/26;H01L21/324 主分类号 G05D23/19
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