发明名称 |
METHOD AND DEVICE FOR CONTROLLING TEMPERATURE |
摘要 |
PURPOSE:To control the temperature quickly with a high precision by obtaining preliminarily correspondence relations between the supply power to a radiation heating means and the temperature of a body to be heated. CONSTITUTION:A target temperature change curve is set preliminarily in a target temperature setter 10. A target temperature signal T0 from the target temperature setter 10 is inputted to a subtractor 31 together with an actually measured temperature signal Tr from a temperature detector 5 provided on the surface of a water 1 in a heating furnace 3 and becomes a deviation signal DELTAT for feedback control. This deviation signal DELTAT is inputted to multipliers 32-34. Multiplication of Kd in the multiplier 34 corresponds to multiplication of a gain in the preceding stage where a differential control output is obtained, and the multiplication output is given to the side of a feed-forward control system FF1. The target temperature signal T0 from the target temperature setter 10 is given to two multipliers 37 and 38 in the feed-forward control system FF.
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申请公布号 |
JPS62160512(A) |
申请公布日期 |
1987.07.16 |
申请号 |
JP19860002549 |
申请日期 |
1986.01.08 |
申请人 |
DAINIPPON SCREEN MFG CO LTD |
发明人 |
TERAOKA HIDEYUKI;CHIBA TAKATOSHI |
分类号 |
G05D23/19;H01L21/22;H01L21/26;H01L21/324 |
主分类号 |
G05D23/19 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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