| 摘要 |
PURPOSE:To shorten an aligning time without decreasing an alignment accuracy by scanning an alignment mark by a longitudinally long sheetlike beam, and then scanning the mark by a longitudinally short sheetlike beam. CONSTITUTION:A sheetlike beam 6 is lengthened longitudinally to scan an alignment mark 1 in first step, and a rough alignment is completed within a predetermined tolerance. Then, the longitudinal length of the beam 6 is shortened, the mark 1 is scanned by a luminous flux having high intensity, and a fine alignment is completed in a predetermined tolerance. Thus, the alignment time can be shortened without decreasing an alignment accuracy. |
