Optical waveguide utilizing a layered structure.

摘要

A planar silicon dioxide waveguide 10 with low loss for the TE mode has been built on a silicon wafer 14 by separating the waveguide from the substrate with a relatively thin layer 11 of polycrystallne silicon and a layer 12 of silicon dioxide having a combined thickness less than that of the waveguide. The separating layers provide a high antiresonant reflectivity which is operative over a broad range of wavelengths.