| 摘要 |
PURPOSE:To reduce corrosion by covering the portions in a reaction tube to be contacted with gases with an alumina film, in which reaction tube gasses are made to flow to grow materials. CONSTITUTION:Al is contained in a source boat 4, and a source boat 3a containing Al is added to the upper stage of the source boat 4 of a source chamber 2a. Then, the boat 4, the growth portion and the boat 3 are heated. Then, a H2 gas and a HCl gas are introduced from a gas introducing ports 5a, 5b, and a H2 gas and a CO2 gas are introduced from a gas introducing port 5c. By adjusting the amounts of the H2 gas to be introduced of the introducing ports 5a, 5b, the CO2 gas is also introduced into the chanber 2a and the vicinity of the boat 3a. With this, an alumina film is formed on the surface of each heated portion to be exposed to the gases.
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