| 摘要 |
PURPOSE:To obtain stable characteristics with a less leakage current by using a transition metal having large free energy of producing an oxide as an electrode metal, and using an oxide of the metal having small free energy of producing an oxide as a dielectric film. CONSTITUTION:A transition metal or its alloy having relatively large free energy of producing an oxide is used as upper and lower electrodes 6, 4. An oxide of transition metal having smaller free energy of producing an oxide than the electrodes 4, 6 is used as a dielectric film 5 interposed between the electrodes 4 and 6. Then, an oxygen void density in the film 5 is low and stably held. Thus, stable characteristic with a less leakage current is obtained. |
