发明名称 Process and means for seizing and conveying silicon wafers.
摘要 <p>Supporting or seizing means are used which come into contact with the edge of each wafer (A); the wafer or wafers thus gripped or supported are then transported from the notch or notches of the basket to the corresponding notch or notches of the nacelle, or conversely; the grip on the edge of the wafers (A) is ensured by bringing into action means (E-E1) which push, from the bottom up, the wafers or certain wafers remaining positioned by the upper portion of the notches (C2) of the sides of the baskets (C), so as to cause the said wafers to be seizable by gaining access to the support portions of the seizing means; the action of one or more seizing means is controlled whereby a portion is brought opposite to the edge of the wafer or wafers; the seizing means are activated in order to bring their seizing portions to bear and to clamp radially or to be substantially against the edge of the wafer or wafers; the one or more seizing means are displaced and the wafer or wafers taken from the basket (C) to the nacelle (D), or conversely. &lt;IMAGE&gt;</p>
申请公布号 EP0228973(A1) 申请公布日期 1987.07.15
申请号 EP19860420002 申请日期 1986.01.06
申请人 CENTRE STEPHANOIS DE RECHERCHES MECANIQUES HYDROMECANIQUE ET FROTTEMENT SOCIETE ANONYME 发明人 REY-HERME, HENRY
分类号 H01L21/673;H01L21/68;H01L21/687 主分类号 H01L21/673
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