| 摘要 |
An emission microscope providing time resolution and high sensitivity to the viewing of light emitted from semiconductor devices is described. The present invention comprises a microscope optic system coupled to an image intensifier. An integrated circuit is viewed with the microscope optics and is stimulated with current flow. As a result of different phenomena, (oxide current, avalanching, and forward biased p-n junctions) light is emitted from the circuit. The image intensifier magnifies the light signal produced by the microscope optics. The output of the intensifier is coupled to a solid-state (CID or CCD) camera. The CID camera outputs a TV signal which is coupled to an image processing computer. The image processing computer controls image enhancement as well as noise reduction. The image processing computer is coupled to an output such as a monitor, a recorder, a printer, or any other suitable display.
|
