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发明名称
HOLDER FOR COMPOUND SEMICONDUCTOR WAFER
摘要
申请公布号
JPS62158193(A)
申请公布日期
1987.07.14
申请号
JP19860303624
申请日期
1986.12.19
申请人
GOULD INC
发明人
BUU NIRUSON
分类号
C30B23/08;C30B23/06;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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