| 摘要 |
PURPOSE:To maintain a chuck with necessary level of attraction force during processing by furnishing a thermo-sensor at a magnetic chuck equipped with an attraction surface, and by installing a cooling means to cool the chuck. CONSTITUTION:A magnetic chuck 2 with an attraction surface 5a to perform fixation of a work W is furnished with No.1 and No.2 thermo-sensors 9, 10 to sense the temp. of the chuck 2, and temp. displays 9a, 10a are provided for displaying the measurements. Further, a cooling means is furnished consisting of solenoid valves 13, 14, pipelines P1, P2 and cooling chambers R1, R2, and also is furnished a control circuit 15 to control operation of said cooling means on the basis of signals given by said thermo-sensors 9, 10. This should prevent increase in the resistance due to temp. rise in the solenoid and also drop of the magnetic motive force, and thereby the chuck can be maintained with necessary attraction force during processing.
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