FREMGANGSMAATE FOR TILVEIEBRINGELSE AV PASSIVE TYNNSJIKTSKRETSER OG PASSIV KRETS FREMSTILT DERVED.

摘要

On a single insulating substrate (1) there are deposited in succession a thin layer of tantalium (2) with high resistivity doped with nitrogen and oxygen, a less thin layer of titanium (3) with low resistivity doped with nitrogen, a layer of palladium (4) and a thick layer of gold (7). Selective chemical attacks of said layers then permit tracing of conducting lines (7), resistive lines with greater resistance (10) and resistive lines with less resistance (13).