OPTICAL INSPECTION DEVICE INSPECTING SURFACE OF THREE-DIMENSIONAL BODY,申请号JP19860287859-传众专利搜索

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发明名称	OPTICAL INSPECTION DEVICE INSPECTING SURFACE OF THREE-DIMENSIONAL BODY
摘要
申请公布号	JPS62156507(A)	申请公布日期	1987.07.11
申请号	JP19860287859	申请日期	1986.12.04
申请人	K L A INSTR CORP	发明人	UIRIAMU EICHI HAADEI;BUARENCHIN EMU IZURAREBU;MAIKERU PII PUDEIANSUKII;MAIKERU SHII ROBINSON;SUTAN DEMARUTA;DEBITSUDO EI GURANO;FUIRITSUPU DEI WATSUSAAMAN
分类号	G01B11/24	主分类号	G01B11/24
代理机构		代理人
主权项
地址

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