| 摘要 |
PURPOSE:To improve the reproducibility and the reliability of a relation of an eccentric quantity and a set radius of a measuring head, by detecting an eccentric quantity of a revolving shaft in the course of executing a measurement, and executing a data correction. CONSTITUTION:The center where a revolving shaft 103 is inclined by an unbalanced load of a measuring head 109, a distance between the center 0 and the first displacement detector 108, a distance between the center 0 and the second displacement detector 110, a set error of a reference radius of curvature R0 generated due to a fact that a measuring head set table 105 is inclined, an accentric quantity of a columnar body 104 generated due to a face that the revolving shaft 103 is inclined, and an inclination angle of a rotation center Z are denoted as 0, L1, L2, epsilon2, epsilon1, and alpha, respectively. The set error epsilon2 of the reference radius of curvature R0 can be derived by an equation (1) by detecting the eccentric quantity epsilon1 of the columnar body 104. Therefore, a true reference radius-of-curvature set value R can be expressed by an equation (2). The inclination angle alpha of the rotation center Z is small enough, therefore, the equation (2) can be expressed by an equation (3), a relation of an equation (4) is formed, and by knowing the eccentric quantity epsilon1 of the columnar body 104, the true reference radius-of-curvature set value R can be derived.
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