| 摘要 |
PURPOSE:To execute a measurement more exactly and with a high accuracy by forming an arm by an insulator, providing an electric resistor on the arm, also converting the quantity of deflection to the quantity of electricity and detecting a minute displacement. CONSTITUTION:An arm 2 of a minute displacement measuring head is formed by an insulator of ceramic and plastic, etc. A comb tooth-shaped resistor 3 is provided on the upper face of the arm which is provided with a probe 1 consisting of a diamond on the tip, and the arm 2 is fixed to a supporting member 4. In case roughness of the surface is measured, the arm 2 is bent a little in accordance with a fine up-and-down motion of the probe 1, therefore, length in the long axis direction of the resistor 3 which is provided on the upper face of the arm 2 is varied and a resistance value is also varied. When the measurement is executed in a state that a prescribed voltage remains applied to the resistor 3, a current is varied by a variation of the resistance value of the resistor 3, the variation of this current is amplified by a general method, and by its signal waveform, roughness of the surface can be measured.
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