| 摘要 |
PURPOSE:To automate a substrate centrifugal rotary drying apparatus and to reduce the cost of the apparatus by rotatably mounting a cradle on a rotor rotatably with respect to a centrifugal direction to readily attach or detach a carrier and overturning the cradle at rotor rotating time to completely shake off moisture. CONSTITUTION:A rotor 1 rotates through a rotational shaft 2. A cradle 5 detachably holds a carrier therein, and a hole for receiving the carrier is opened at the top of the cradle 5. It is preferable to form another hole for splashing water shaken off from the carrier or a wafer in the bottom of the cradle 5. Since the cradle 5 is stopped steadily with its hole directed upward by the gravity itself, the carrier can be set as it is. When the rotor 1 is rotated in the state that the carrier is set, the cradle 5 is effected by a centrifugal force to rotate at 90 deg. as designated by 5' in a centrifugal direction, thereby dehydrating the carrier and the wafer to cause the moisture to be shaken off in this state.
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