| 摘要 |
PURPOSE:To automate the manufacture of semiconductor products by automation of processing, carrying and in-process control by a method wherein a host computer identifies the lot of racks detected by a letter code identifying unit of specified process to automatically set up the processing requirements for the next process. CONSTITUTION:Semiconductor product manufacturing unit groups 1, 3... operating each process of manufacturing semiconductor products, an automatic carrier transferring a rack 8 containing a work between the semiconductor product manufacturing units and a host computer 7 controlling the overall system are provided. Within such a semiconductor product manufacturing system, each rack 8 is provided with a displayer 14 while letter code identifying devices 15 to detect the displayer 14 of rack 8 are arranged on the rack delivery part of each process. Through these procedures, the host computer 7 automatically classifies and registers are racks 8 detected by the letter code identifying unit 15 of the first process in lot to control the following racks 8 further identifying the lot of racks 8 detected by the letter code identifying unit 13 of specified process to automatically set up the processing requirements of semiconductor product manufacturing unit in the next process.
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