| 摘要 |
PURPOSE:To enable an operator to be trained in correct operations easily by using actual semiconductor manufacturing equipment for simulation in the same operations as actual ones by a method wherein a personal computer is additionally provided with a judging means etc. making the personal computer judge of any input signals from an input part to be for training or not. CONSTITUTION:A manufacturing unit 1 to be controlled for processing wafers, a controller (microcomputer) 2 controlling the manufacturing unit 1, an outer memory 8 storing the control program of controller 2, a display device 7 displaying the controlled items by controller 2 and input.output data, an input part 9 inputting the controlled items and data in the data from the outer memory 8, the display device 7 and the input part 9 in and out of the controller 2 are provided. Furthermore, a displaying means making the displayer device 7 displaying the selective direction for training or operation, a judging means making the personal computer 3 judge of the input signals from input part 9 to be for training or not and a transmitting means transmitting directive signals for testing when the judging means judges of the input signals to be for training are additionally provided.
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