发明名称 MANUFACTURE APPARATUS FOR SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要 PURPOSE:To simplify the services and maintenance of a furnace core tube while reducing the dust raised in case of forming an oxide film by a method wherein a replaceable receiver is provided inside the furnace core tube. CONSTITUTION:A receiver 2 made of quarts glass is provided inside a furnace core tube 1. The receiver 2 4mm thick (similar to furnace core tube) 2,100mm long curves taking the half moon shape in contact with the furnace walls. In such a constitution, a stopper 6 of receiver 2 made of columnar quartz glass is provided on this side of receiver 2 to prevent the receiver 2 from being pushed inward by hanging the stopper 6 of receiver 2 on the end edge of inlet.outlet of the furnace core tube 1.
申请公布号 JPS62154725(A) 申请公布日期 1987.07.09
申请号 JP19850294836 申请日期 1985.12.27
申请人 NEC KYUSHU LTD 发明人 YONEDA KIYOSHI
分类号 H01L21/31;H01L21/22 主分类号 H01L21/31
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