| 摘要 |
PURPOSE:To surely support a grown single crystal and obtain a longer and larger-diameter crystal than a conventional crystal by supporting the side periphery of a single crystal with plural sets of supporting mechanisms consisting of a slider, stopper and supporting mechanism in supporting the single crystal in a floating zone (FZ) process. CONSTITUTION:A snigle crystal is supported by a floating zone melting process. In the process plural sets of mechanisms consisting of the following mechanisms (A)-(C) are provided on the side periphery of the single crystal; (A) sliders 2 slidable along guides 1 provided in the radial direction are installed in the innermost part and have a protruding part 3 directing to the center of the apparatus and an outside surface forming a tilted surface 4. (B) Stoppers 6 are provided on the outside of the sliders 2 and have a tilted surface 3 corresponding to the tilted surface of each slider 2 and an engaging part 5 for engaging with the tilted surface 4 of the slider 2 and stopping the sliding of the slider 2. (C) Supporting mechanisms 7 holding each stopper 6 and optionally opening to bring the tilted surface 4 of the slider 2 into contact with the tilted surface 23 of the engaging part 5.
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