发明名称 MOLECULAR BEAM EVAPORATOR
摘要 PURPOSE:To consume a raw material from the tip gradually without collapsing the shape of the raw material and to obtain stable intensity of molecular beam, by transferring a heater set at the outside of a raw material storage container along the side wall of the raw material storage container. CONSTITUTION:A raw material 1 such as rod As, etc., for example, is put in a raw material storage container 2 made of PBN and an electric current is sent to the heater 3 to heat the raw material 1. In the operation, the heater 3 is attached to the end of a transfer mechanism 7 and the heater 3 is gradually transferred from the tip part of the raw material 1 to the other. Consequently, a hole is partially bored at the tip part of the raw material 1 and no hole is opened through the whole raw material. Therefor always stable intensity of molecular beam is obtained without extremely collapsing the shape of the raw material 1.
申请公布号 JPS62153193(A) 申请公布日期 1987.07.08
申请号 JP19850291529 申请日期 1985.12.24
申请人 NEC CORP 发明人 IDE YUICHI
分类号 C30B23/08;H01L21/203 主分类号 C30B23/08
代理机构 代理人
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