| 摘要 |
PURPOSE:To simultaneously perform flaw detection and dimensional measurement and to further perform the precise compensation of temp. in dimensional measurement, by forming a water chamber for flaw detection and a water chamber for dimensional measurement to a probe holder and additionally providing a temp. compensation probe in the vicinity of a dimension measuring probe. CONSTITUTION:A probe holder 14 is rotated at a high speed and water is injected in a water chamber 38 for flaw detection and a water chamber 36 for dimensional measurement from the proper place of a groove 90 through a water guide part 92. A material P to be inspected is inserted through the guide member 86 in a rotor 83 from the leading end thereof by a feed device and ultrasonic waves are vertically emitted to the material P to be inspected from dimension measuring probes 52, 54 to measure the dimension and thickness of the material P to be inspected. At this time, the change in the temp. of sonic velocity is detected by a temp. compensating probe 56 and a reflective plate 58 and the signals from the dimension measuring probes 52, 54 are corrected to remove the effect of temp. change. The flaw detection of the material P to be detected is performed by a method wherein ultrasonic waves are obliquely emitted to the material P to be inspected from flaw detection probes 62, 64, 66, 68 and ultrasonic echoes reflected and returned from the interface of the damage of flaw present in the material P to be inspected are detected.
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