| 摘要 |
PURPOSE:To enable the incorporation of a driver even in a large-scale CCD image sensor by a method wherein the driver which outputs clock voltage is provided on the same semiconductor substrate. CONSTITUTION:When a photo image is projected by application of a charge accumulation voltage on the electrode of a photoelectric conversion part 12, charges corresponding to the picture element of the photo image generate in each subdivision of the photoelectric conversion part. When a transfer gate 18 is opened by application of a voltage, and a transfer voltage is then impressed on CCD parts 14 and 16, the charges in each subdivision of the part 12 flow in alternately to the side of CCD14 or CCD16 through the gate 18 as shown by arrows, and next transferred to the side of an output gate 36. The transfer voltage consists of a constant DC potential E in one phase, and a rectangular wave clock phi1 or phi2 in the other phase, both of which can transfer charges in the same manner as the double-phase drive of the rectangular wave clock. Besides, a driver is unnecessary because of the DC potential in one side; therefore the number of drivers can be reduced to half, and a driver-loaded 2K picture element CCD image sensor can be realized. |
