| 摘要 |
<p>PURPOSE:To efficiently remove silanes in a dry state at low temp. by contacting gas containing silanes as noxious components with a removing agent prepared by supporting soda lime by a copper (II) compound. CONSTITUTION:For example,a precipitate of copper hydroxide formed by mixing copper sulfate and sodium hydroxide in an aqueous solution form is washed, dried and baked to prepare copper oxide. This copper oxide is mixed with soda lime to be supported thereby. This copper oxide supported soda lime is allowed to fill a removing cylinder and gas containing monosilane exhausted from a semiconductor manufacturing process is made to flow through the removing cylinder to remove the noxious component such as monosilane in said gas.</p> |
