| 摘要 |
PURPOSE:To aim at enhancing the water affinity of a microtome blade, by heat-treating an amorphous SiC film formed on a substrate by a plasma gas phase deposition process, at a specified temperature to crystallize the same, and by dipping the substrate 1 in olive oil or olein acid just after the heat- treatment. CONSTITUTION:In a plasma gas phase deposition process, a substrate 1 is set in a reactor into which a silane compound is then introduced in the form of a mixture gas with hydrogen or argon gas as carrier gas, and thereafter, the atmospheric pressure in the reactor is set to be less than 1torr while high frequency power is applied to the atmosphere of the reactor to produce plasma therein so that the silane compound is made into contact with plasma flames to be thermally decomposed to obtain amorphous silicon carbide. The thus obtained amorphous silicon carbide is heat-treated at a temperature in a range from about 700-1,250 deg.C to obtain crystalline silicon carbide. Then, the substrate 1 which has been just heat-treated, is dipped in olive oil or olein acid for 40-80min to form an SiC coating film 2 or an ultra-thin olein acid film thereon, thereby it is possible to obtain a microtome blade having an excellent water affinity.
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