| 摘要 |
<p>PURPOSE:To efficiently remove silanes in a dry state at low temp., by contacting gas containing silanes as noxious components with soda lime. CONSTITUTION:Soda line synthesized by heating quick lime impregnated with a conc. sodium hydroxide solution or usual commercial soda lime is allowed to fill a removing cylinder and gas containing silanes such as monosilane and disilane etc. exhausted from a semiconductor manufacturing process is made to flow through the removing cylinder to remove silanes being noxious components.</p> |
