| 发明名称 |
Semiconductor-type flow rate detecting apparatus |
| 摘要 |
In a semiconductor-type flow rate detecting apparatus, a casing arranged in the fluid path includes first and second semiconductor chips. The first semiconductor chip has a first temperature detector. The second semiconductor chip arranged in proximity to the first semiconductor chip has a heater and a second temperature detector.
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| 申请公布号 |
US4677850(A) |
申请公布日期 |
1987.07.07 |
| 申请号 |
US19860843922 |
申请日期 |
1986.03.21 |
| 申请人 |
NIPPON SOKEN, INC. |
发明人 |
MIURA, KAZUHIKO;HATTORI, TADASHI;IWASAKI, YUKIO;KOHAMA, TOKIO;KANEHARA, KENJI |
| 分类号 |
G01F1/684;G01F1/69;G01F1/692;G01F1/698;G01F5/00;(IPC1-7):G01F1/68 |
主分类号 |
G01F1/684 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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