发明名称 Method of laser trimming in semiconductor wafer
摘要 A method of laser trimming in a semiconductor wafer, and more particularly, a method of laser trimming for disconnecting programmable links by use of a laser beam which links are provided within a multiplicity of semiconductor integrated circuit elements formed in the semiconductor wafer.
申请公布号 US4678889(A) 申请公布日期 1987.07.07
申请号 US19850795609 申请日期 1985.11.06
申请人 NEC CORPORATION 发明人 YAMANAKA, HIROSHI
分类号 B23K26/00;H01L21/268;H01L21/768;H01L21/82;H01L23/525;H01L27/01;H01L27/10;(IPC1-7):B23K26/00 主分类号 B23K26/00
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