发明名称 CONTAMINATION PREVENTING APPARATUS FOR REMOVING NOXIOUS GAS AND ITS USE
摘要 <p>The toxic gases are typically arsine and/or phosphine in a hydrogen atmosphere, in combination or otherwise with traces of chlorine, gallium, indium and/or aluminium; the device consists of a combustion chamber whose outer walls are cooled, which receives via a first entry the hydrogen with which the gases and products to be removed are mixed, and which receives via a second entry gaseous oxygen at a pressure controlled so that the combination of oxygen and hydrogen differs from the composition of the so-called "detonating" mixture, the hydrogen forms in the oxygen a so-called "diffusion" flame fed by means of ignition and in which the products to be removed are burned, the residues from this combustion which are especially arsenious anhydride and/or phosphoric acid and, in all cases, water, are collected in an exit provided with means for controlling the pressure and are directed towards storage means, and the device additionally comprises safety control means. <IMAGE></p>
申请公布号 JPS62152517(A) 申请公布日期 1987.07.07
申请号 JP19860295772 申请日期 1986.12.13
申请人 PHILIPS GLOEILAMPENFAB:NV 发明人 MISHIERU BERUTO;JIRUBEERU RAPORUTO
分类号 B01D53/46;B01D53/64;F23G7/06;H01L21/205;H01L21/302;H01L21/3065 主分类号 B01D53/46
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