BIDIRECTIONAL MICRODISPLACEMENT DEVICE

摘要

PURPOSE:To obtain the independent microdisplacement in two(2) directions in a miniaturized and simple constitution by using a plate piezoelectric element with its middle portion removed rectangularly. CONSTITUTION:Both ends of a plate piezoelectric element 7 with its middle portion removed rectangularly and having a polarized axis in its thickness direction while placing electrodes 7a-7c on the upper and lower surfaces are fixed with fixed members 9a and 9b. The electrodes 7b and 7c are separated in the direction parallel to the fixed end sides at the middle portion between both fixed ends. Furthermore, to the separated portion of the electrodes a unidirectional microdisplacement unit 10 is installed which is displaced in the direction parallel to the fixed end sides. By the impression of voltage to the upper and lower surface electrodes 7a-7c the microdisplacement occurs in the direction orthogonal to the displaced direction of the unidirectional microdisplacement unit 10.