| 摘要 |
PURPOSE:To provide a titled member which prevents the material deterioration of the member by the high temp. during the formation of the film and has the improved adhesiveness of the film by having the corrosion resistant alloy film essentially consisting of Co, Cr and W by vacuum deposition on the surface of a base material. CONSTITUTION:An alloy essentially consisting of Co, Cr and W is evaporated in the vacuum in which the partial pressure of Ar and the partial pressure of C2H2 are respectively specified to deposit the vapor of the above-mentioned alloy by ion plating in the vacuum on the surface of the base material (e.g.; SUS410J-1) heated and held to and at 500 deg.C. the film consisting of, for example, Co and the balance 28wt% Cr, 5.1wt% W and 0.9wt% Co is coated on the surface of the base material. The material deterioration of the base material by the formation of the corrosion resistant alloy film is thereby prevented and the adhesiveness of said film is improved. As a result, the life of the member having the corrosion resistant alloy film is considerably extended.
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