发明名称 THIN FILM FORMING DEVICE
摘要 PURPOSE:To decrease the blobs to be formed on the surface of a film surface by constituting a titled device in such a manner that a high-polymer film can be heated near the position to part from a cooling drum in the stage of forming a thin film on a long-sized substrate while transferring the substrate by a roll to roll system. CONSTITUTION:The long-sized substrate 40 of the high-polymer film wound in a let-off roll 41a is transferred by the roll to roll system while said film is held in tight contact with the cylindrical cooling drum 41b. The thin film is then continuously formed on the substrate 40 under the transfer. A means 60 for heating the substrate 40 near the position where the substrate 40 parts from the drum 41b is provided in said position. The fixing of the blobs which are the fine ruggedness to be permanently generated on the surface of the film 40 during the transfer onto the film on cooling of the film is thus prevented.
申请公布号 JPS62151563(A) 申请公布日期 1987.07.06
申请号 JP19850290769 申请日期 1985.12.25
申请人 TEIJIN LTD 发明人 SUGIYAMA MASATO;AOYANAGI HIROSHI
分类号 G11B5/85;C23C14/56;G11B5/851 主分类号 G11B5/85
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